Photoresist coating

Photoresist coating

Desktop-Programmable Spin Coater


Contact person

Mr. Huang
  • Specification
  • Describe
Equipment summary: Applicable size: 2"-12" Wafer substrate.
Basic specifications:
Appearance material: The PP board is welded together, which can resist corrosion.
Operating basin cover: Made of SUS, round pot design.
Basin cover flip: Separate transparent PVC upper cover.
Suction cup specifications: A set of aluminum suction cups are protected by anodized precision grinding molds.
Operation and feeding method: Manual direct input, manual feeding.
Liquid type: Photoresist, solvent.
Motor: AC Servo Motor (speed: 10-6000 RPM)
With vacuum pump (with PP dust cover)
Vacuum seepage protection: Yes, indirect protection design.
Vacuum brief inspection know: Yes (digitally designed vacuum value Kpa lower limit protection).
Protection and control: There is a complete state of the device, and an abnormality is detected.
Electric control system:
Software: PLC。
Control method: Color touch man-machine system, spindle speed graph.
Recipe module and number of segments setting: 100 groups of formulas, each formula has 30 segments.

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